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Image Search Results
Journal: Nanoscale
Article Title: Etching-free patterning method for electrical characterization of atomically thin MoSe2 films grown by chemical vapor deposition.
doi: 10.1039/c4nr03817g
Figure Lengend Snippet: Fig. 1 illustrates schematically the process of patterning with SU- 8, whose procedure is described in details in the experimental section. Briefly, after the synthesis of large area and atomically thin MoSe2 film with CVD on SiO2/Si substrate, SU-8 solution was spincoated and soft-baked on top of the sample. As SU-8 is a 50 negative resist, EBL was used to expose the area of SU-8 layer in a certain shape and size that will remain on the sample after the resist development step. Finally, the developed SU-8 structure carries along the MoSe2 layer beneath it upon the removal of the SU-8 layer in Remover PG solvent. Thus, the MoSe2 film is 55 removed in an area whose shape corresponds to the exposed SU-8 area during the EBL process.
Article Snippet: 17 MoSe2 devices fabrication and patterning were performed with
Techniques: Solvent