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material stack  (Seagate Technology)

 
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    Seagate Technology material stack
    Material Stack, supplied by Seagate Technology, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
    https://www.bioz.com/product/material+stacks/material+stack/pm30010091-70-3-7
    Average 90 stars, based on 1 article reviews
    material stack - by Bioz Stars, 2026-10
    90/100 stars

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    other:

    Article Title: Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features.
    Article Snippet: Material stack: The material stack (provided by Seagate Technology LLC) is comprised of a 6” prime grade silicon wafer substrate with 300 nm thermal SiO2, 5 nm e-beam evaporated chromium, 20 nm sputtered carbon and a 7 nm SiO2 layer.



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